弊社は、下記のCVD、ALD前駆体のお取り扱いをしております。
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| CAS NO. | 化学名称 |
|---|---|
| 165461-74-5 | Ag(fod)(PEt3) |
| 75-24-1 | Trimethylaluminum |
| 33012-33-8 | Trimethyl(trimethylphosphine)gold |
| - | Trimethyl(triethylphosphine)gold |
| 147658-83-1 | Bis[tri(i-propyl)cyclopentadienyl]barium |
| 12078-25-0 | Dicarbonylcyclopentadienyl cobalt |
| - | Bis(N,N'-di-t-butylacetamidinato)cobalt |
| 56792-69-9 | (3,3-Dimethyl-1-butyne)dicobalt Hexacarbonyl |
| 635680-58-9 | Bis(N,N'-di-isopropylacetamidinato)cobalt |
| 185827-91-2 | Bis(dimethylamino-2-propoxy)copper |
| 14781-45-4 | Copper hexafluoroacetylacetonate |
| - | Bis(N,N'-di-isopropylacetamidinato)copper |
| - | Bis(N,N'-di-t-butylacetamidinato)copper |
| 35733-23-4 | Erbium(III) tris(2,2,6,6-tetramethyl-3,5-heptanedionate |
| 7344-40-3 | Tetrakis(dimethylamino)germanium |
| 19782-68-4 | Tetrakis(dimethylamino)hafnium |
| 352535-01-4 | Tetrakis(ethylmethylamino)hafnium |
| 941596-80-1 | Tris(dimethylamino)cyclopentadienylhafnium |
| - | Hafnium 3-Methyl-3-pentoxide |
| 34822-89-4 | Cyclopentadienylindium(I) |
| 1272-23-7 | Tris(cyclopentadienyl)lanthanum |
| 148607-23-2 | Tris(methylcyclopentadienyl)lanthanum |
| 635680-72-7 | Lanthanum tris(NN'-diisopropylacetamidinate |
| 14319-13-2 | Lanthanum tetramethylheptanedionate |
| - | Manganese tetramethylheptanedionate |
| - | Bis(N,N'-di-isopropylacetamidinato)manganese |
| 923956-62-1 | Bis(t-butylimino)bis(dimethylamino)molybdenum |
| 40672-08-0 | Bis(methylcyclopentadienyl)magnesium |
| 19824-58-9 | Pentakis(dimethylamino)niobium |
| 864150-47-0 | (tert-Butylimino)tris(ethylmethylamino)niobium |
| 210363-27-2 | (tert-Butylimino)tris(diethylamino)niobium |
| 1271-28-9 | Nickelocene |
| 1293-95-4 | Bis(methylcyclopentadienyl)nickel |
| 31886-51-8 | Bis(ethylcyclopentadienyl)nickel |
| - | Bis(dimethylamino-2-propoxy)nickel |
| 14481-08-4 | Nickel tetramethylheptanedionate |
| 635680-62-5 | Bis(N,N'-di-isopropylacetamidinato)nickel |
| 940895-79-4 | Bis(N,N'-di-t-butylacetamidinato)nickel |
| 64916-48-9 | Palladium hexafluoroacetylacetonate |
| 15214-66-1 | Palladium tetramethylheptanedionate |
| 94442-22-5 | Trimethyl(methylcyclopentadienyl)platinum |
| 52649-53-3 | η4-2,3-dimethylbutadiene Ruthenium tricarbonyl |
| 27804-64-4 | Bis(diethylamino)silane |
| 186598-40-3 | Bis(tert-butylamino)silane |
| 15112-89-7 | Tris(dimethylamino)silane |
| 908831-34-5 | Diisopropylaminosilane |
| 594-10-5 | Trimethylantimony |
| - | Tris(triethylsilyl)antimony |
| 7289-92-1 | Tris(dimethylamino)antimony |
| 18990-42-6 | Scandium hexafluoroacetylacetonate |
| - | Tris(triethylsilyl)selenium |
| 1066-77-9 | Tetrakis(dimethylamino)tin |
| 1421599-46-3 | Bis(N,N'-di-isopropylacetamidinato)tin |
| 147658-82-0 | Bis(1,2,4-tri-isopropylcyclopentadienyl)strontium |
| 7750-45-0 | Titanium chloride |
| 546-68-9 | Titanium isopropoxide |
| 3275-24-9 | Tetrakis(dimethylamino)titanium |
| 4419-47-0 | Tetrakis(diethylamino)titanium |
| - | Tris(dimethylamino)cyclopentadienyltitanium |
| 14846-56-1 | Bis(triethylsilyl)tellurium |
| 19824-59-0 | Pentakis(dimethylamino)tantalum |
| 511292-99-2 | (tert-Butylimino)tris(ethylmethylamino)tantalum |
| 169896-41-7 | (tert-butylimino)tris(diethylamino)tantalum |
| 406462-43-9 | Bis(tert-butylimino)bis(dimethylamino)tungsten |
| - | Tris(N,N'-di-isopropylacetamidinato)yittrium |
| 19756-04-8 | Tetrakis(dimethylamino)zirconium |
| 175923-04-3 | Tetrakis(ethylmethylamino)zirconium |
| 557-20-0 | Diethylzinc |